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鏁版嵁搴撹繛鎺ュけ璐
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杩樻病鏈夎处鍙凤紵蹇潵鍏嶈垂娉ㄥ唽

鎮ㄧ殑浣嶇疆 > 棣栭〉 > 浼氬憳娉ㄥ唽

浼氬憳娉ㄥ唽

鐢ㄦ埛鍩烘湰淇℃伅

鐢ㄦ埛鍚鑷冲皯6涓瓧绗,鏈澶18涓瓧绗
鍏徃鍚嶇О
鐧诲綍瀵嗙爜
瀵嗙爜纭
鐢靛瓙閭
楠岃瘉鐮侊細 璇疯緭鍏ラ獙璇佺爜
鏈嶅姟鏉℃

娆㈣繋鎮ㄦ敞鍐屾垚涓篗EMS鍏叡鎶鏈湇鍔″钩鍙扮殑鐢ㄦ埛锛 璇蜂粩缁嗛槄璇讳笅闈㈢殑鍗忚锛屽彧鏈夋帴鍙楀崗璁墠鑳界户缁繘琛屾敞鍐屻
1锛 鏈嶅姟鏉℃鐨勭‘璁ゅ拰鎺ョ撼
    MEMS鍏叡鎶鏈湇鍔″钩鍙扮敤鎴锋湇鍔$殑鎵鏈夋潈鍜岃繍浣滄潈褰扢EMS鍏叡鎶鏈湇鍔″钩鍙版墍鏈夈侻EMS鍏叡鎶鏈湇鍔″钩鍙版墍鎻愪緵鐨勬湇鍔″皢鎸夌収鏈夊叧绔犵▼銆佹湇鍔℃潯娆惧拰鎿嶄綔瑙勫垯涓ユ牸鎵ц銆傜敤鎴烽氳繃娉ㄥ唽绋嬪簭鐐瑰嚮"鎴戝悓鎰" 鎸夐挳锛屽嵆琛ㄧず鐢ㄦ埛涓嶮EMS鍏叡鎶鏈湇鍔″钩鍙拌揪鎴愬崗璁苟鎺ュ彈鎵鏈夌殑鏈嶅姟鏉℃銆
2锛嶮EMS鍏叡鎶鏈湇鍔″钩鍙扮畝浠
    MEMS鍏叡鎶鏈湇鍔″钩鍙帮紝渚濇墭鍗庢鼎涓婂崕鍗佷綑骞村崐瀵间綋缁忛獙鍜岃妯″埗閫犺兘鍔涳紝閫氳繃鍙戝睍涓績鐨勬ˉ姊佺航甯︿綔鐢紝寤烘垚鍥藉唴棣栨潯涓嶤MOS宸ヨ壓绾垮拰MEMS瑙勬ā鍒堕犵嚎鏃犵紳瀵规帴鐨凪EMS鐮斿彂鐢熶骇鍜屾祴璇曞钩鍙般備綔涓哄浗鍐呴涓泦MEMS璁捐銆佸姞宸ュ拰娴嬭瘯鏈嶅姟鑳藉姏浜庝竴浣撶殑鍏叡鎶鏈钩鍙帮紝鐩墠鍦ㄤ紶鎰熺綉鍥介檯鍒涙柊鍥凡缁忛泦鑱氫竴鎵瑰叿鏈夎嚜涓荤煡璇嗕骇鏉冪殑MEMS浼犳劅鍣ㄧ爺鍙戞満鏋勫拰浼佷笟銆傚钩鍙板彲瀵瑰鎻愪緵MEMS璁捐銆佸皝瑁呬互鍙婃祴璇曞悇椤规湇鍔°
3锛 鏈嶅姟鏇存柊
    MEMS鍏叡鎶鏈湇鍔″钩鍙颁細瀹氭湡鏇存柊鏈嶅姟浠嬬粛浠ュ強璁惧鏇存柊娑堟伅锛屼細缁欐敞鍐岀敤鎴峰彂閫侀偖浠舵帹閫併
4锛 鐢ㄦ埛闅愮鍒跺害
    灏婇噸鐢ㄦ埛涓汉闅愮鏄疢EMS鍏叡鎶鏈湇鍔″钩鍙扮殑鍩烘湰鏀跨瓥銆傚钩鍙颁笉浼氬叕寮銆佺紪杈戞垨閫忛湶鐢ㄦ埛鐨勬敞鍐屼俊鎭
5锛 鐢ㄦ埛鐨勫笎鍙凤紝瀵嗙爜鍜屽畨鍏ㄦ
    涓鏃︽敞鍐屾垚鍔熸垚涓篗EMS鍏叡鎶鏈湇鍔″钩鍙扮敤鎴凤紝鎮ㄥ皢寰楀埌涓涓瘑鐮佸拰甯愬彿銆傚鏋滄偍涓嶄繚绠″ソ鑷繁鐨勫笎鍙峰拰瀵嗙爜瀹夊叏锛屽皢瀵瑰洜姝や骇鐢熺殑鍚庢灉璐熷叏閮ㄨ矗浠汇
6锛 缃戠珯鍐呭鐨勬墍鏈夋潈
    MEMS鍏叡鎶鏈湇鍔″钩鍙板湪缃戠珯涓婁负瀹㈡埛鎻愪緵鐨勪俊鎭瓑鎵鏈夊唴瀹瑰彈鐗堟潈銆佸晢鏍囥佹爣绛惧拰鍏跺畠璐骇鎵鏈夋潈娉曞緥鐨勪繚鎶ゃ傜敤鎴峰彧鑳藉湪MEMS鍏叡鎶鏈湇鍔″钩鍙板拰骞垮憡鍟嗘巿鏉冧笅鎵嶈兘浣跨敤杩欎簺鍐呭锛岃屼笉鑳芥搮鑷鍒躲佺鏀硅繖浜涘唴瀹广佹垨鍒涢犱笌鍐呭鏈夊叧鐨勬淳鐢熶骇鍝併
7锛 瑙i噴鏉
    鏈敞鍐屽崗璁殑瑙i噴鏉冨綊MEMS鍏叡鎶鏈湇鍔″钩鍙版墍鏈夈傚鏋滃叾涓湁浠讳綍鏉℃涓庡浗瀹剁殑鏈夊叧娉曞緥鐩告姷瑙︼紝鍒欎互鍥藉娉曞緥鐨勬槑鏂囪瀹氫负鍑嗐

鎴戝凡闃呰骞跺悓鎰銆奙EMS鍏叡鎶鏈湇鍔″钩鍙版湇鍔℃潯娆俱

璐墿杞︼細
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鏈嶅姟
鍘荤粨绠

缃戠珯娴侀噺缁熻婧愮爜

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